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SILICON MICROSTRUCTURES INCORPORATED
*
SM5611/SM5612
OEM Pressure, Constant Current DIP OEM Pressure, Constant Voltage DIP
OEM PRESSURE TRANSDUCER FULLY TEMPERATURE COMPENSATED AND CALIBRATED DUAL-IN-LINE PACKAGE
DESCRIPTION
The SM5600 Series of OEM pressure sensors are fully calibrated, temperature compensated pressure sensors in dual inline packages for printed circuit board mounting. These sensors offer improved performance as well as the option for either constant current or constant voltage excitation. Ultra-low pressure ranges are also available (see SM5651/SM5652 datasheet), resulting in the broadest selection of standard pressure ranges in the industry. The SM5600 Series pressure sensors are constructed by attaching a highly stable piezoresistive pressure sensor chip to a ceramic substrate. Thick film resistors on the ceramic are laser trimmed during manufacturing to provide zero offset calibration, temperature compensation for zero offset, and temperature compensation for sensitivity. In the Model SM5611, an additional resistor is trimmed to normalize the output of an external differential amplifier to provide span calibration when the sensor is driven by a constant current supply. In the Model SM5612, a constant voltage supply can be used and the normalized output span of each sensor can then be easily amplified. The model SM5611 is designed for constant current excitation. The model SM5612 is designed for constant voltage excitation. Various electrical pin and pressure port configurations are available for flexibility in matching this product to specific applications.
FEATURES
* * * * * * * * 5, 15, 30, 60, and 100 PSI FS Ranges Available Constant voltage and constant current versions Easy to use dual in-line package (DIP) Wide 0-60C compensated temperature range Span calibration to 2% Zero offset calibration High performance, stable packaged silicon chip Gage, differential, and absolute pressure configurations
APPLICATIONS
* * * * * * Barometric Pressure Medical Instrumentation Environmental Control Altimeters Automotive Diagnostics Appliances
Rev 1.2 8_02 2001-2002
Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 Sales@Si-Micro.Com WWW.Si-Micro.Com
SM5611/SM5612
CHARACTERISTICS FOR SM5611/SM5612 - SPECIFICATIONS
Test Conditions: Model SM5611 w/excitation = 1.500mA @ 25 oC, Model SM5612 w/excitation = 10.00Vdc @ 25 oC, unless otherwise specified.
Min.
Excitation Current (SM5611) Voltage (SM5612) Output Span (SM5611) Span (SM5612) Offset Temperature Performance TC Span TC Offset Temp Hysteresis Accuracy Linearity Repeatability Pressure Hysteresis Sensitivity Matching Impedance (SM5611) Z Input Z Output Impedance (SM5612) Z Input Z Output Temperature Range Calibration Operating Storage Dynamic Characteristics Proof Pressure Burst Pressure 0.00 0.00 75.0 39.5 -2.00 -0.5 -0.5
Typ.
1.50 10.00 105.0 40.0 0.20 0.2 0.2 0.1 0.05 0.05 0.05 0.20 3.00 3.30 8.00 2.50
Max.
3.00 20.00 150.0 40.5 2.00 0.5 0.5
Units
mA V mV mV mV %FS %FS %FS %FS %FS %FS %FS k k k k C C C FS Pressure FS Pressure
Notes
1 2
3 3
-0.10 -0.10 -0.10 -2.00 1.80 2.70 4.50 2.00 0 -40 -55
0.10 0.10 0.10 +2.00 3.80 3.80 25.00 3.80 60 125 125
4
1, 5
3X or 225 PSI, whichever is less 5X or 225 PSI, whichever is less
Notes: 1. Positive Pressure is defined as entry on the bottom side of the die; gain, during factory calibration, is set using negative pressure 2. Output span of unamplified sensor 3. Measured over a temperature range of 0 to 60 oC. 4. Best fit straight line 5. Sensitivity matching relates to part-to-part matching
ORDERING INFORMATION:
Pressure Ranges PSI 5611/ 5612 5 005 15 015 30 030 60 060 100 100
Circuit Configuration for SM5611
Model 5611 Pin-out Model 5612 Pin-Out 1 -Signal Out 1 -Signal Out 2 -Iexc 2 -Vexc 3 +Signal Out* 3 +Signal Out* 4 +Iexc 4 +Vexc 5 Gainset Resistor 5 Do Not Connect 6 Gainset Resistor 6 Do Not Connect *Output increases as pressure is increased on Positive
Differential Tube or Absolute Tube
DO NOT connect to "Do Not Connect" pins
Notes: - All dimensions are shown in inches - Tolerance on all dimensions + 0.005" unless otherwise specified.
Pin Configuration
Notice: Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies. Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.2 8_02 2001-2002 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 Sales@Si-Micro.Com WWW.Si-Micro.Com

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